Layout Design Rules and Gate Layouts
March 10, 2024
- Draw and explain briefly the n-well CMOS design rules.
- Discuss in detail with a neat layout, the design rules for a CMOS inverter.
- Write the layout design rules and draw diagram for four input NAND and NOR.
- State the minimum width and minimum spacing lambda based design rules to draw the layout.
- Layout rules also referred to as design rules.
- It can be considered as prescription for preparing the photomasks, which are used in the fabrication of integrated circuits.
- The rules are defined in terms of feature sizes (widths), separations and overlaps.
- The main objective of the layout rules is to build reliable functional circuits in as small area as possible.
- Layout design rules describe how small features can be and how closely they can be reliably packed in a particular manufacturing process.
- Design rules are a set of geometrical specifications that dictate the design of the layout masks.
- A design rule set provides numerical values for minimum dimensions and line spacing.
- Scalable design rules are based on a single parameter (λ), which characterizes the resolution of the process. λ is generally half of the minimum drawn transistor channel length.
- This length is the distance between the source and drain of a transistor and is set by the minimum width of a polysilicon wire.
Lambda based rule (Scalable design rule):
- Lambda-based rules are round up dimensions of scaling to an integer multiple of λ.
- Lambda rules make scaling layout small. The same layout can be moved to a new process, simply by specifying a new value of λ.
- The minimum feature size of a technology is characterized as 2λ.
Micron Design Rules (Absolute dimensions):
- The MOSIS rules are expressed in terms of lambda.
- These rules allow some degree of scaling between processes.
- Only need to reduce the value of lambda and the designs will be valid in the next process down in size.
- These processes rarely shrink uniformly.
- Thus, industry usually uses the actual micron design rules for layouts.
- There are set of micron design rules for a hypothetical 65 nm process.
- We can observe that, these rules differ slightly but not immensely from lambda based rules with lambda = 0.035 micro meter.
- Upper level metal rules are highly variable depending on the metal thickness. Thicker wires require greater widths, spacing and bigger vias.
Two metal layers in an n-well process has the following:
- Metal and diffusion have minimum width and spacing of 4 λ.
- Contacts are 2 λ × 2 λ and must be surrounded by 1 λ on the layers above and below.
- Polysilicon uses a width of 2 λ.
- Polysilicon overlaps diffusion by 2 λ where a transistor is desired and has a spacing of 1 λ away where no transistor is desired.
- Polysilicon and contacts have spacing of 3 λ from other polysilicon or contacts.
- N-well surrounds pMOS transistors by 6 λ and avoids nMOS transistors by 6 λ.
Simplified λ -based design rules with CMOS inverter layout diagram |
Design Rule:
Well Rules:
- The n-well is usually a deeper implant than the transistor source/drain implants.
- Therefore, it is necessary to provide sufficient clearance between the n-well edges and the adjacent n+ diffusions.
Transistor Rules:
- CMOS transistors are generally defined by at least four physical masks.
- There are active (also called diffusion, diff, thinox, OD, or RX), n-select (also called nimplant, n-imp, or nplus), p-select (also called p-implant, pimp, or pplus) and polysilicon (also called poly, polyg, PO, or PC).
- The active mask defines all areas, where n- or p-type diffusion is to be placed or where the gates of transistor are to be placed.
Contact Rules:
- There are several generally available contacts:
- Metal to p-active (p-diffusion)
- Metal to n-active (n-diffusion)
- Metal to polysilicon
- Metal to well or substrate
Metal Rules:
- Metal spacing may vary with the width of the metal line.
- Metal wire width of minimum spacing may be increased. This is due to etch characteristics versus large metal wires.
Via Rules:
- Processes may allow vias to be placed over polysilicon and diffusion regions.
- Some processes allow vias to be placed within these areas, but do not allow the vias to the boundary of polysilicon or diffusion.
Example: NAND3
Draw the gate layout diagram of NAND.
Horizontal N-diffusion and p-diffusion strips
Vertical polysilicon gates
Metal1 VDD rail at top
Metal1 GND rail at bottom
Draw diagram for four input NAND and NOR gate